| 摘要 |
<P>PROBLEM TO BE SOLVED: To carry out cooling according to the heat generating temperatures of manufacturing apparatus without providing local cooling means in a clean room where the manufacturing apparatus of different heat generating temperatures coexist. <P>SOLUTION: This clean room air conditioning system includes FFUs (fan filter units) 40 disposed at a ceiling frame; opening means 30 disposed at the ceiling frame to return air to a ceiling plenum chamber 4 from the clean room 1; a grating floor disposed at a floor of the clean room 1 to exhaust air to an underfloor chamber 3 from the clean room 1; and FCUs (fan coil units) 50 equipped with blowers. The arranged positions and the arranged number of the FFUs 40 and opening means 30 are set according to the heat generating temperatures of the respective manufacturing apparatus 10, 20. The FFUs 40 are adjustable in the blowing amount to maintain the temperature around the respective manufacturing apparatus 10, 20 to a predetermined temperature, and indoor air returned from the underfloor chamber 3, and air cooled by the FCUs to have a lower temperature than an indoor temperature, are mixed and supplied to the clean room 1. <P>COPYRIGHT: (C)2013,JPO&INPIT |
