发明名称 FEED UNIT AND INGOT GROWER INCLUDING THE SAME
摘要 PURPOSE: A feed unit and an apparatus for growing an ingot including the same are provided to form an ingot having a desired diameter by pulling the ingot from a source melt. CONSTITUTION: A growth chamber(101) includes a supply port. A crucible(104) is installed inside the growth chamber and is filled with silicon. A pull chamber(102) provides a transfer port for a seed. A hopper discharges the silicon through an exhaust port. A transfer pipe includes the exhaust line discharging the silicon.
申请公布号 KR20120116091(A) 申请公布日期 2012.10.22
申请号 KR20110033635 申请日期 2011.04.12
申请人 SEMIMATERIALS. CO., LTD. 发明人 KIM, BOK SAENG;SHIN, HWA SOO;KWON, OH EUN
分类号 C30B15/00;C30B15/30;C30B29/06;H01L21/02 主分类号 C30B15/00
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