| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an apparatus for producing pure water which can achieve long-term stable operation of an ultrapure water production apparatus. <P>SOLUTION: The ultrapure water production apparatus includes a UV oxidation device for carrying out oxidative decomposition of bacilli contained in treating water, a photocatalytic reactor for decomposing ozone in the treating water passed through the UV oxidation device, and an ion exchange device for filtering the treating water which has passed the photocatalytic reactor. The ultrapure water production apparatus is characterized in that the photocatalytic reactor is constituted so that two or more steps of moldings formed of nonwoven fabric of a silica group composite oxide fiber having a photocatalytic function are arranged in a reaction vessel and the moldings come into contact with the treating water under irradiation of UV ray of 254 nm wavelength. <P>COPYRIGHT: (C)2013,JPO&INPIT |
