| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a plasma cleaning apparatus that achieves plasma cleaning without damaging an LED element mounted on a lead frame. <P>SOLUTION: In a state that a plurality of lead frames 3 are stored in respective storage grooves 13 of three storage blocks 10 in a storage device and opening/closing doors are closed, the plasma cleaning device 1 supplies plasma reactive gas into a chamber 1A held in a vacuum state, and applies a high frequency to one of a pair of electrodes by a high-frequency power source to turn the reactive gas to plasma and the lead frames 2 is cleaned. At this time, the respective lead frames 3 stored in the respective storage grooves 13 of the storage device 2 are drawn downward with magnetic force of respective magnets 14 to stand upright, so the respective lead frames 3 are made not to tilt to have their upper-end parts closer or farther to the contrary. <P>COPYRIGHT: (C)2013,JPO&INPIT |
