| 发明名称 |
TEMPERATURE CONTROL MECHANISM, PLASMA PROCESSING APPARATUS AND TEMPERATURE CONTROL METHOD |
| 摘要 |
<P>PROBLEM TO BE SOLVED: To variably control contact pressure with an object to be subject to temperature control, using a plurality of elastic members. <P>SOLUTION: A temperature control mechanism 200 comprises: elastic vertical bellows 215 at least partly in contact with an object to be subject to temperature control; elastic horizontal bellows 220 connected to the vertical bellows 215; and a control unit 310 to control liquid flowing internal space in the vertical bellows 215 and the horizontal bellows 220. <P>COPYRIGHT: (C)2013,JPO&INPIT |
| 申请公布号 |
JP2012204737(A) |
申请公布日期 |
2012.10.22 |
| 申请号 |
JP20110069721 |
申请日期 |
2011.03.28 |
| 申请人 |
TOKYO ELECTRON LTD |
发明人 |
SASAKI YASUHARU;NOGAMI KENICHI |
| 分类号 |
H01L21/3065;C23C16/46;C23C16/50 |
主分类号 |
H01L21/3065 |
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