APPARATUS AND METHOD FOR PRODUCING CIGS SOLAR BATTERY
摘要
<p>PURPOSE: A CIGS solar battery manufacturing device and method are provided to evaporate a light absorption layer of uniform thickness by preventing oxygen and hydrogen bubbles to be included in the light absorption layer. CONSTITUTION: A plating liquid(132) evaporates a light absorption layer on a substrate. Oxygen and hydrogen bubbles are discharged to outside while the light absorption layer is evaporated on the substrate. A receiving part(131) stores the plating liquid. An electrode(133) is installed in the receiving part. A power supply part supplies a power source to the substrate and the electrode. A vacuum chamber provides vacuum atmosphere. A vacuum pump is arranged at one side of the vacuum chamber. A heater is placed inside the vacuum chamber. [Reference numerals] (120) Vacuum pump</p>
申请公布号
KR20120115614(A)
申请公布日期
2012.10.19
申请号
KR20110033021
申请日期
2011.04.11
申请人
INDUSTRIAL COOPERATION FOUNDATION CHONBUK NATIONAL UNIVERSITY;DASS TECH CO., LTD.
发明人
CHOI, CHEL JONG;MOON, KYUNG WON;OH, MI KYUNG;KIM, YOUNG HO