Apparatus for thin layer deposition,申请号KR20100014272-传众专利搜索

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发明名称	Apparatus for thin layer deposition
摘要
申请公布号	KR101193191(B1)	申请公布日期	2012.10.19
申请号	KR20100014272	申请日期	2010.02.17
申请人		发明人
分类号	C23C14/24;H01L21/205;H01L51/56	主分类号	C23C14/24
代理机构		代理人
主权项
地址

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