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发明名称	SUBSTRATE PROCESSING APPARATUS
摘要
申请公布号	KR101192676(B1)	申请公布日期	2012.10.19
申请号	KR20117026006	申请日期	2007.01.25
申请人		发明人
分类号	H01L21/00;H01L21/02	主分类号	H01L21/00
代理机构		代理人
主权项
地址

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