| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method of manufacturing an inkjet head having an orifice surface in which defects are reduced. <P>SOLUTION: This method of manufacturing an inkjet head includes: a step of preparing an insulating substrate (11) having a row of a plurality of piezoelectric members (13) adjacent to each other via a pressure chamber (14) in between on a surface and provided with a metal film (16) on at least an upper surface of the piezoelectric members; a step of bonding a frame (12) on the insulating substrate so that the row of the piezoelectric members are surrounded by the frame; a step of removing the metal film on the upper surface of the piezoelectric members by polishing to expose the upper surface of the piezoelectric members and polishing the upper surface of the frame; and a step of bonding an orifice plate (20) on the upper surfaces of the piezoelectric members and the frame after the polishing. <P>COPYRIGHT: (C)2013,JPO&INPIT |
