发明名称 |
COMBINE APPARATUS OF SCANNING ELECTRON MICROSCOPE AND ENERGY DISPERSIVE X-RAY SPECTROSCOPY |
摘要 |
<p>Disclosed is a combine apparatus of a scanning electron microscope and an energy dispersive x-ray spectroscopy in that the scanning electron microscope and the energy dispersive x-ray are combined, whereby unifying as one apparatus. The combine apparatus of the scanning electron microscope and the energy dispersive x-ray spectroscopy includes: an image generation means for detecting electrons emitted from a sample for measuring a shape of the sample and simultaneously generating a scanning electron microscope image for analyzing an x-ray; a controller for generating a display control signal and a specific position storing control signal of the image generated from the image generation means; and an x-ray measuring circuit for accumulating an energy level on a specific position of the image generated from the image generation means according to the specific position storing control signal generated by the controller to provide an element information thereof.</p> |
申请公布号 |
WO2012141396(A1) |
申请公布日期 |
2012.10.18 |
申请号 |
WO2011KR07773 |
申请日期 |
2011.10.19 |
申请人 |
COXEM CO., LTD;LEE, JUN-HEE |
发明人 |
LEE, JUN-HEE |
分类号 |
H01J37/28;G01N23/225 |
主分类号 |
H01J37/28 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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