SWITCHING DEVICE OF MICRO ELECTRO MECHANICAL SWITCH, MICRO ELECTRO MECHANICAL SWITCH BASED ON ALIGNED CARBON NANOTUBE ARRAYS AS CONTACT MATERIAL AND METHOD FOR FABRICATION THEREOF

摘要

PURPOSE: A switching device of a micro electromechanical switch, the micro electromechanical switch, and a manufacturing method thereof are provided to stably transmit high current density by using the aligned carbon nano tube array. CONSTITUTION: A source electrode(10) is electrically connected to a drain electrode(20). The drain electrode is formed between a gate electrode(30) and the source electrode. A shuttle is movably connected to the drain electrode by a spring(22). A first contact device(41) is formed in one end of an anchor. A second contact device(42) is formed in one end of the shuttle.