SUBSYSTEM FOR PRODUCING ULTRAPURE WATER

摘要

PROBLEM TO BE SOLVED: To provide a subsystem for producing ultrapure water in which an adsorption device low in pressure loss is arranged at a rear stage of a UF membrane device (ultrafiltration membrane device).

SOLUTION: The subsystem 3 producing ultrapure water from primary pure water includes at least: a UV device 13; a degasifier 15; an ion-exchange resin device 16; the UF membrane device 17; and the adsorption device 18 arranged at the rear stage of the UF membrane device and filled with a granular adsorbent with 1-3 mm of a grain size. In the subsystem 3 for producing ultrapure water, water passes through the adsorption device 18 by the pressure of water flowing out of the UF membrane device 17 without using a booster pump.

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