发明名称 FLUID BED REACTOR
摘要 Fluidized bed reactor systems for producing high purity silicon-coated particles are disclosed. A vessel has an outer wall, an insulation layer inwardly of the outer wall, at least one heater positioned inwardly of the insulation layer, a removable concentric liner inwardly of the heater, a central inlet nozzle, a plurality of fluidization nozzles, at least one cooling gas nozzle, and at least one product outlet. The system may include a removable concentric sleeve inwardly of the liner. In particular systems the central inlet nozzle is configured to produce a primary gas vertical plume centrally in the reactor chamber to minimize silicon deposition on reactor surfaces.
申请公布号 US2012263874(A1) 申请公布日期 2012.10.18
申请号 US201013510922 申请日期 2010.11.17
申请人 发明人 OSBORNE E. WAYNE;SPANGLER MICHAEL V.;ALLEN LEVIC C.;GEERTSEN ROBERT J.;EGE PAUL E.;STUPIN WALTER J.;ZEININGER GERALD
分类号 B05D1/22;C23C16/24 主分类号 B05D1/22
代理机构 代理人
主权项
地址