| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a photosensitive resin composition having a sufficient effect on improvement of resolution and resist removing properties. <P>SOLUTION: A photosensitive resin composition contains (A) a binder polymer including a structural unit based on styrene or styrene derivative, a structural unit based on (meta) acrylic acid benzyl or (meta) acrylic acid benzyl derivative, a structural unit based on (meta) acrylic acid, and a structural unit based on (meta) acrylic acid alkyl ester and having a degree of dispersion of 1.0 to 2.0, (B) a photopolymerizable compound, and (C) a photopolymerization initiator. <P>COPYRIGHT: (C)2013,JPO&INPIT |
