| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an acoustic pressure sensor device having a multilayer film structure with staggered metal layers. <P>SOLUTION: A fixed electrode 28 is provided on a substrate 22. A multilayer film structure 36 has multiple metal layers 32 and multiple metal plugs 30 connecting the multiple metal layers 32. A chamber is formed as an acoustic chamber 40 between the multilayer film structure 36 and the fixed electrode 28. The multiple metal layers 32 each have multiple metal sections. The multiple metal sections of one metal layer 32 and those of at least another metal layer 32 are staggered to form a blanket surface as viewed from a moving direction of an orthogonal acoustic wave when the multilayer film structure 36 receives acoustic pressure. <P>COPYRIGHT: (C)2013,JPO&INPIT |
