| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a protective filter for vacuum pump which can remove efficiently microparticles, which cause trouble of the vacuum pump, and which can avoid damage of the vacuum pump and prolong a life of the vacuum pump. <P>SOLUTION: The protective filter for vacuum pump includes: a fixed casing 1 provided with an exhaust pipe 3 connected thereto for supplying exhaust gas H including microparticles and accommodating microparticle collection liquid 4 inside; a rotating drum 2 being filled a filler 5 for collecting the microparticles, rotating inside the casing 1 immersing a part of the filler 5 to the microparticle collection liquid 4, flowing the exhaust gas H supplied into the casing 1 contacting the microparticle collection liquid 4 at a surface of the filler 5, and discharging the inflow gas h through an opening 6 provided at a rotation center part CL; and a connecting pipe 7 having an opening facing the opening 6 of the rotating drum 2, fixed to the fixed casing 1, and connected to the vacuum pump C. <P>COPYRIGHT: (C)2013,JPO&INPIT |
