| 摘要 |
A position sensing device having a high range to resolution ratio comprises a light source arrangement, a moving aperture arrangement and a multiple position sensitive detector (PSD) arrangement. The multiple PSD arrangement comprises a plurality of position sensitive detectors arranged along at least two detection tracks along a measuring axis. Each of the plurality of position sensitive detectors shares a common portion of a total measuring range along the measuring axis with an adjacent position sensitive detector which is on a different detector track. The total measurement range is larger than the detector range of each of the position sensitive detectors.
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