SENSOR ELEMENT

摘要

The invention relates to a sensor element for measuring accelerations in three spatial directions. The aim of invention is to provide a sensor element of this type that produces reliable measurement results, that is compact and that can be produced at low cost. The sensor element comprises at least one seismic mass that can be deflected in three spatial directions, a membrane structure that represents the suspension of the seismic mass, and at least one stationary counter-electrode for capacitively measuring the deflections of the membrane structure. The invention is characterized in that the membrane structure comprises at least four electrically separate electrode regions that are mechanically coupled to each other via the seismic mass.