| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a manufacturing method of a piezoelectric device that is insulated from the influence of static electricity. <P>SOLUTION: On a substrate 20 are formed a plurality of piezoelectric elements 11A and 11B each including a piezoelectric substance 51 in which a first conductor 40 is formed on an undersurface and a second conductor 60 is formed on a top face, and a segmentation line 15 that is a scheduled line to segment the substrate 20 is set. A piezoelectric device manufacturing method comprises: an element formation process of connecting two first conductors 40 of the piezoelectric element 11A and the piezoelectric element 11B, and connecting two second conductors 60 of the piezoelectric element 11A and the piezoelectric element 11B by a lower electrode line 42 and an upper electrode line 62, respectively, which intersect the segmentation line 15; and a segmentation process of segmenting the substrate along the segmentation line 15 to disconnect the distribution lines which intersect the segmentation line. <P>COPYRIGHT: (C)2013,JPO&INPIT |
