| 摘要 |
<P>PROBLEM TO BE SOLVED: To draw an exposure pattern capable of forming a servo pattern by which servo information can be properly read out. <P>SOLUTION: In drawing of patterns PS5a, PS5b of a both phase servo part, when a total length along a rotation direction for each radial position, of a pair of areas A1, A2 adjacent to each other in the rotation direction, among exposure areas A1 and non-exposure areas A2 forming the patterns PS5a, PS5b, is a first length respectively, a beam is radiated so that a first value, obtained by dividing total radiation amount of the beam for drawing within the range of the first length in one servo track ST by the first length, is larger in one where an intersection angle in the track ST is larger, than in the other where the intersection angle is smaller, of the both patterns PS5a, PS5b in the same radial position, in an area including the radial position where an angular difference, in the same radial position, between the intersection angle of a side intersecting the rotation direction against a radial direction in the area A1 in one of the both patterns PS5a, PS5b and the intersection angle in the other is the largest. <P>COPYRIGHT: (C)2013,JPO&INPIT |
