PIEZOELECTRIC VIBRATION ELEMENT, PIEZOELECTRIC VIBRATOR, PIEZOELECTRIC OSCILLATOR, AND ELECTRONIC DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a mesa type piezoelectric vibration element that prevents coupling of flexural vibration or the like with contour vibration mode and has a small CI value.

SOLUTION: A piezoelectric vibration element 100 includes: a piezoelectric substrate 10; excitation electrodes 20 that are arranged on both main surfaces so as to face each other; lead-out electrodes 22; and pads 24. The piezoelectric substrate 10 has an excitation portion 14 in the center thereof, and a thin peripheral portion 12 that is provided on an outer edge of the excitation portion 14. Two opposite side surfaces of the excitation portion 14 are each flat with no level difference. Two other opposite side surfaces of the excitation portion 14 each have level differences in a thickness direction. The pads 24 have respective support regions 26, in respective positions corresponding to respective corners of the piezoelectric substrate 10, where the piezoelectric substrate 10 is fixed to a support member. The excitation electrodes 20 are formed over a vibration region that extends across the excitation portion 14 and at least part of the peripheral portion 12.

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