APPARATUS AND METHOD FOR RECOVERY OF SULFUR HEXAFLUORIDE

摘要

An apparatus and a method for recovery of sulfur hexafluoride is provided. Sulfur hexafluoride (SF6) may be separated with high-concentration and improved recovery ratio through a multi-stage separation and recovery processes using a plurality of separation membrane modules, and as well, SF6 gas may be concentrated to maximize the SF6 recovery ratio before the separation and recovery processes through the separation membrane modules. Furthermore, sulfur dioxide (SO2) and moisture included in the SF6 waste gas may be removed effectively so as to extend the service life of the separation membrane modules.