METHODS OF FABRICATING MEMS HAVING ELEVATED LAND REGIONS FOR ROUTING AND DEVICES FABRICATED BY THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a method of fabricating a microelectromechanical system (MEMS) device with a reduced number of masking processes, and also provide a MEMS device fabricated by the method.

SOLUTION: The device includes a front substrate 1000 comprising an array region and a peripheral region. The front substrate comprises a plurality of supports 1011a-1011d, 1013a-1013c defining a plurality of lower regions therebetween in the array region. The front substrate further comprises a land in the peripheral region. At least a portion of the land has substantially the same height as the supports in the array region. The device also includes a plurality of conductors formed over the land in the peripheral region. The conductors are electrically isolated from one another. The device further includes a conductive layer formed on the lower regions of the front substrate.

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