| 摘要 |
<P>PROBLEM TO BE SOLVED: To simplify the structures of an air spring actuator, an active vibration isolator, and a passive vibration isolator, and to enable space-saving and sufficient vibration damping control. <P>SOLUTION: The air spring actuator includes two or more air spring parts 31 which are disposed between a mounting base 2 and a foundation 300 and have gas chambers 31b connected to a gas source 4 and pressure controlled by control valves 31a, and a controller 6 which moves the mounting base 2 to a target position by controlling the control valves 31a based on relative displacement from the target position on the mounting base 2. Each of the air spring parts 31 is disposed so as to make a driving force act in an inclined direction to the vertical axis Z, while two adjacent air spring parts 31 are disposed forming a pair so as to become symmetrical to the vertical axis Z. <P>COPYRIGHT: (C)2013,JPO&INPIT |
