| 摘要 |
The imprint apparatus of the present invention molds and cures a resin on a substrate using a mold to thereby form a pattern of the cured resin on the substrate. In this case, the resin is a mixture of an ultraviolet curable resin that is cured by receiving ultraviolet light and a luminescent material that fluoresces or phosphoresces by receiving ultraviolet light. The imprint apparatus further includes a light-emission detecting unit configured to detect light emitted from the luminescent material. After the mold is released from the ultraviolet curable resin, which is mixed with the luminescent material, on the substrate, the light-emission detecting unit detects light emitted from a residual resin that remains in a concave and convex portion of the pattern formed on the mold.
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