发明名称 VIBRATION PIECE, VIBRATOR, OSCILLATOR AND ELECTRONIC APPARATUS
摘要 <P>PROBLEM TO BE SOLVED: To provide a vibration piece capable of suppressing decline of a Q-value; and a vibrator, an oscillator and an electronic apparatus which have the vibration piece. <P>SOLUTION: A crystal vibration piece 1 comprises a base part 10, and vibration arms 11a,11b and 11c which extend in a Y-axis direction from the base part 10. The vibration arms 11a,11b and 11c each have an arm width W in an X-axis direction orthogonal to the Y-axis direction in a plan view, and are provided on principal surfaces 10a thereof with excitation electrodes 12a,12b and 12c each for vibrating each vibration arm in a Z-axis direction orthogonal to the principal surface 10a, respectively. Wiring lines 13a,13b and 13c are extracted from the excitation electrodes 12a,12b and 12c toward the base part 10, respectively, and the wiring lines 13a,13b and 13c have narrow regions 13a1,13b1 and 13c1 in which a width W2 in an X-axis direction is narrower than a width W1 in an X-axis direction of each excitation electrode, respectively. When a whole length of each vibration arm in the Y-axis direction is taken as L by using the boundary between each vibration arm and the base part 10 as a base point, a range X in the Y-axis direction of each narrow region is at least within 0.1 L from the base point toward the base part 10. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP2012199603(A) 申请公布日期 2012.10.18
申请号 JP20110060458 申请日期 2011.03.18
申请人 SEIKO EPSON CORP 发明人 KAWAI HIROKI
分类号 H03H9/19;H01L41/09;H01L41/18;H01L41/22;H03B5/32;H03H9/215 主分类号 H03H9/19
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