摘要 |
<P>PROBLEM TO BE SOLVED: To provide the structure of an element end where there is no defect in the cutting plane after dicing, and missing does not occur in the pixel array in a large area imaging device where multiple image sensors are joined in the shape of tiles, and to provide a manufacturing method therefor. <P>SOLUTION: The structure of a light-receiving region of a joined end is a part of an element isolation region, and the total width of the element isolation regions close to each other is equal to or narrower than the width of an element isolation region other than the joined region. <P>COPYRIGHT: (C)2013,JPO&INPIT |