| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a resist coating device capable of applying resist to a uniform thickness. <P>SOLUTION: The resist coating device comprises a transport roll for transporting a long base material, a transfer roll for transferring resist to the base material on the transport roll, a raise roll for raising the resist from a resist supply part and supplying the resist to the transfer roll, and grooves formed at both ends in the long direction of the resist transfer region of the transfer roll so as to go around at least once. <P>COPYRIGHT: (C)2013,JPO&INPIT |
