| 摘要 |
PURPOSE: An RF MEMS switch device and a manufacturing method thereof are provided to improve an on and off property of a switch by forming a pulling electrode overlapping a membrane electrode. CONSTITUTION: A bias electrode(80) is arranged on a substrate and supplies a bias voltage. A pair of signal electrodes(70a,70b) transmit an RF signal from one side to the other side. A membrane electrode(150) is formed on the upper side of a dielectric layer. A bias line(30) connects the membrane electrode to the bias electrode. A pair of pulling electrodes(60a,60b) overlap the membrane electrode.
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