发明名称 SEMICONDUCTOR MEMORY DEVICE
摘要 A semiconductor memory device including a bit line, a word line, a transistor, and a capacitor is provided. The transistor includes source and drain electrodes; an oxide semiconductor film in contact with at least both top surfaces of the source and drain electrodes; a gate insulating film in contact with at least a top surface of the oxide semiconductor film; a gate electrode which overlaps with the oxide semiconductor film with the gate insulating film provided therebetween; and an insulating film covering the source and drain electrodes, the gate insulating film, and the gate electrode. The transistor is provided in a mesh of a netlike conductive film when seen from the above. Here, the drain electrode and the netlike conductive film serve as one and the other of a pair of capacitor electrodes of the capacitor. A dielectric film of the capacitor includes at least the insulating film.
申请公布号 US2012261664(A1) 申请公布日期 2012.10.18
申请号 US201213443928 申请日期 2012.04.11
申请人 SAITO TOSHIHIKO;SEMICONDUCTOR ENERGY LABORATORY CO., LTD. 发明人 SAITO TOSHIHIKO
分类号 H01L29/786 主分类号 H01L29/786
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