MESOPOROUS SILICA FILM, STRUCTURAL BODY HAVING MESOPOROUS SILICA FILM, ANTIREFLECTION FILM, OPTICAL MEMBER, AND METHODS OF PRODUCING THE SAME

摘要

Provided is a mesoporous silica film, including a structure represented by SiO(2-n/2)Xn (where X represents a group formed of at least one kind selected from the group consisting of an alkyl group, a fluorinated alkyl group, and fluorine, n represents an integer of 1 or more and 3 or less) in a surface layer of the mesoporous silica film, in which: an element component ratio (A1/S1) of sum of number of carbon atoms and number of fluorine atoms (A1) to number of silicon atoms (S1) in the surface layer is 0.1 or more; and an element component ratio (A2/S2) of sum of number of carbon atoms and number of fluorine atoms (A2) to number of silicon atoms (S2) in an inner layer of the mesoporous silica film is smaller than the element component ratio (A1/S1).