METHOD OF FORMING MEMBRANES WITH MODIFIED STRESS CHARACTERISTICS
摘要
A method of modifying stress characteristics of a membrane in one embodiment includes providing a membrane layer, determining a desired stress modification, and forming at least one trough in the membrane layer based upon the determined desired stress modification.
申请公布号
WO2012142400(A1)
申请公布日期
2012.10.18
申请号
WO2012US33501
申请日期
2012.04.13
申请人
ROBERT BOSCH GMBH;GRAHAM, ANDREW, B.;YAMA, GARY;O'BRIEN, GARY
