| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an electronic component capable of improving humidity resistance, an electronic device, and a manufacturing method of the electronic component. <P>SOLUTION: This invention discloses: an electronic component comprising a piezoelectric substrate 10, a series resonator 12 and a parallel resonator 14 which are provided on the piezoelectric substrate 10, signal wiring 20 which is provided on the piezoelectric substrate 10 and electrically connected with the series resonator 12 and the parallel resonator 14, a metal wall 32 which is provided on the piezoelectric substrate 10 and surrounds the series resonator 12, the parallel resonator 14 and the signal wiring 20, and a sealing part 38 which is in contact with the metal wall 32, covers the series resonator 12, the parallel resonator 14 and the signal wiring 20 so as to form a gap 34 on the series resonator 12 and the parallel resonator 14 and is composed of a liquid crystal polymer; an electronic device provided with the electronic component; and a manufacturing method of the electronic component. <P>COPYRIGHT: (C)2013,JPO&INPIT |
