| 摘要 |
<P>PROBLEM TO BE SOLVED: To detect an electron to be detected having an orbit near the optical axis of a primary beam and an electron to be detected having an orbit on the outside thereof separately by a simple configuration. <P>SOLUTION: The electron detection mechanism comprises a plate 5 in which an aperture 4 for passing a primary beam 2 is formed and both surfaces form a scintillation surface, an energy filter 3, a first photodetector 7a for detecting scintillation light 23 generated when a first electron to be detected 21 that is emitted from a sample 10 in response to irradiation of the scintillation surface on the side facing the sample 10 with the primary beam 2 arrives, and a second photodetector 7b for detecting scintillation light 24 generated when a second electron to be detected 22a that is emitted from the sample 10 in response to irradiation with the primary beam 2, passed through the aperture 4 of the plate 5 and turned away by the energy filter 3 arrives. <P>COPYRIGHT: (C)2013,JPO&INPIT |
