| 摘要 |
<P>PROBLEM TO BE SOLVED: To accurately and surely inspect whether or not gas is leaked from a metallic sealed tube into which the gas is sealed under pressure. <P>SOLUTION: An oscillator 111 is stuck close to the outer peripheral surface of a sound sealed tube 1 in which no occurrence of leakage is confirmed and an ultrasonic wave P is made incident on the oscillator 111, and a reflected ultrasonic wave Pr is received to determine a response electric signal S so as to be set as a reference response signal S0. For a sealed tube 1 to be an inspection target, a response electric signal S is similarly determined. A cross-correlation coefficient between the reference response signal S0 and the response electric signal S of the inspection target is determined, and when the determined cross-correlation coefficient is a predetermined reference value or less, occurrence of leakage in the sealed tube 1 to be the inspection target is determined. <P>COPYRIGHT: (C)2013,JPO&INPIT |
