| 摘要 |
In a polishing performed by imparting kinetic energy to abrasive using a compressed gas flow, horizontal cutting force is obtained while vertical cutting force acting on a surface of a workpiece is inhibited. A compressed gas containing no abrasive is ejected from an accelerated flow generation nozzle 10 toward a surface of a workpiece W to generate an accelerated flow S along the surface of the workpiece W. Also, abrasive 30 is introduced into an abrasive introduction path 20 opening toward the surface of the workpiece W at an area where the accelerated flow S is generated, preferably together with a compressed gas to merge the abrasive 30 with the accelerated flow S and make the abrasive 30 slide along the surface of the workpiece W. Thus, horizontal cutting force is exerted on the surface. |
