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发明名称
Leak detection method and micro-machined device assembly
摘要
申请公布号
EP1524511(B1)
申请公布日期
2012.10.17
申请号
EP20040077771
申请日期
2004.10.06
申请人
DELPHI TECHNOLOGIES, INC.
发明人
CHRISTENSON, JOHN C.;RICH, DAVID B.
分类号
G01M3/18;G01M3/22;G01M3/40
主分类号
G01M3/18
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代理人
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