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发明名称
摘要
申请公布号
JP5052071(B2)
申请公布日期
2012.10.17
申请号
JP20060229727
申请日期
2006.08.25
申请人
发明人
分类号
H01L21/316;C23C16/40;C23C16/42;H01L21/31;H01L21/336;H01L29/786
主分类号
H01L21/316
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