发明名称 |
Wide aperture Wien ExB mass filter |
摘要 |
An ExB Wien mass filter provides an independently-adjustable electric field combined with the dipole electric field required for mass separation. The independently adjustable electric field can be used to provide a larger optical aperture, to correct astigmatism and to deflect the beam in direction parallel and/or perpendicular to the magnetic field. |
申请公布号 |
EP2511934(A1) |
申请公布日期 |
2012.10.17 |
申请号 |
EP20120164204 |
申请日期 |
2012.04.16 |
申请人 |
FEI COMPANY |
发明人 |
TUGGLE, DAVID;PARKER, N. WILLIAM |
分类号 |
H01J37/05 |
主分类号 |
H01J37/05 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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