发明名称 Wide aperture Wien ExB mass filter
摘要 An ExB Wien mass filter provides an independently-adjustable electric field combined with the dipole electric field required for mass separation. The independently adjustable electric field can be used to provide a larger optical aperture, to correct astigmatism and to deflect the beam in direction parallel and/or perpendicular to the magnetic field.
申请公布号 EP2511934(A1) 申请公布日期 2012.10.17
申请号 EP20120164204 申请日期 2012.04.16
申请人 FEI COMPANY 发明人 TUGGLE, DAVID;PARKER, N. WILLIAM
分类号 H01J37/05 主分类号 H01J37/05
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