| 摘要 |
<p>An object of the present invention is to provide a flexible substrate conveying device that is capable of keeping a conveyance height of a flexible substrate constant without being affected by a decrease in a frictional force of a grip roller or a change in diameter of the grip roller. A substrate retaining device 21 of a conveying device 100 according to the present invention has: a pair of grip rollers 23, 24; a support mechanism 25 that supports the pair of grip rollers 23, 24 so that the grip rollers 23, 24 can come into contact with and separate from each other; a transmission mechanism 50 for transmitting a force for bringing the grip roller 24 into pressure contact with the grip roller 23; first driving means 60 configured to adjust the pressure contact force of the pair of grip rollers 23, 24; an angle adjusting mechanism 70 that is configured to incline the pair of grip rollers 23, 24 with respect to a conveying direction of a flexible substrate 1; and second driving means 80 configured to adjust an inclination angle of the pair of grip rollers 23, 24 with respect to the conveying direction of the flexible substrate 1.</p> |
