| 发明名称 |
A MULTI-AXIS MAGNETIC LENS |
| 摘要 |
<p>The present invention relates to a multi-axis magnetic lens for a charged particle beam system. The apparatus eliminates the undesired non-axisymmetric transverse magnetic field components from the magnetic field generated by a common excitation coil and leaves the desired axisymmetric field for focusing each particle beam employed within the system.</p> |
| 申请公布号 |
EP2510523(A1) |
申请公布日期 |
2012.10.17 |
| 申请号 |
EP20100744493 |
申请日期 |
2010.01.22 |
| 申请人 |
HERMES MICROVISION INC. |
发明人 |
CHEN, ZHONGWEI;REN, WEIMING;KANAI, KENICHI;LIU, XUEDONG |
| 分类号 |
G21K1/08;H01J37/141 |
主分类号 |
G21K1/08 |
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