发明名称 |
METHOD FOR MANUFACTURING A LIGHT EMITTING DEVICE AND A DEPOSITION APPARATUS |
摘要 |
<p>PURPOSE: A method for manufacturing a light emitting device and a deposition apparatus are provided to produce emitted light color into a clear image by forming a plurality of light emitting elements more than 3types into a full-color light emitting device. CONSTITUTION: A substrate moves within a chamber. One opening(703b) is formed at the upper portion of an anti-sticking shield(703a). An evaporation source(704) is formed under the anti-sticking shield. A depositing material is placed inside the evaporation source and is heated. The depositing material is discharged from the opening of the anti-sticking shield while the substrate is transferred to the top of the anti-sticking shield. A light-emitting layer comprises the depositing material. The light-emitting layer is formed on the substrate.</p> |
申请公布号 |
KR20120115180(A) |
申请公布日期 |
2012.10.17 |
申请号 |
KR20120094491 |
申请日期 |
2012.08.28 |
申请人 |
SEMICONDUCTOR ENERGY LABORATORY CO., LTD. |
发明人 |
SAKAKURA MASAYUKI;NODA TAKESHI;KUWABARA HIDEAKI;YAMAZAKI SHUNPEI |
分类号 |
H01L51/56;C23C14/24;H01L51/50;H05B33/10 |
主分类号 |
H01L51/56 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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