发明名称 METHOD FOR MANUFACTURING A LIGHT EMITTING DEVICE AND A DEPOSITION APPARATUS
摘要 <p>PURPOSE: A method for manufacturing a light emitting device and a deposition apparatus are provided to produce emitted light color into a clear image by forming a plurality of light emitting elements more than 3types into a full-color light emitting device. CONSTITUTION: A substrate moves within a chamber. One opening(703b) is formed at the upper portion of an anti-sticking shield(703a). An evaporation source(704) is formed under the anti-sticking shield. A depositing material is placed inside the evaporation source and is heated. The depositing material is discharged from the opening of the anti-sticking shield while the substrate is transferred to the top of the anti-sticking shield. A light-emitting layer comprises the depositing material. The light-emitting layer is formed on the substrate.</p>
申请公布号 KR20120115180(A) 申请公布日期 2012.10.17
申请号 KR20120094491 申请日期 2012.08.28
申请人 SEMICONDUCTOR ENERGY LABORATORY CO., LTD. 发明人 SAKAKURA MASAYUKI;NODA TAKESHI;KUWABARA HIDEAKI;YAMAZAKI SHUNPEI
分类号 H01L51/56;C23C14/24;H01L51/50;H05B33/10 主分类号 H01L51/56
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