发明名称 |
METHOD OF INSPECTING A SUBSTRATE |
摘要 |
PURPOSE: A substrate inspecting method is provided to input and save a coordinate value and fault code value through a computerization process, thereby accurately and rapidly performing an inspection process. CONSTITUTION: A substrate inspecting method comprises next steps. A coordinate value indicating a position of a pseudo fault detected by an automatic optical inspecting device is saved in a database by using a programmed primary procedure function(S104). A fault coordinate value corresponding to the true fault is saved in the database by suing the programmed secondary procedure function(S203). [Reference numerals] (AA) Start; (BB) Finish; (S101) Coordinate value input; (S102) Coordinate value extraction; (S103) Existing on a primary saving table?; (S104, S203) Addition; (S105) Coordinate value corresponding to the last decision failure?; (S106, S204) Renewal; (S201) Failure code value input; (S202) Existing on a secondary saving table?
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申请公布号 |
KR20120114930(A) |
申请公布日期 |
2012.10.17 |
申请号 |
KR20110032780 |
申请日期 |
2011.04.08 |
申请人 |
SAMSUNG ELECTRO-MECHANICS CO., LTD. |
发明人 |
YOON, SEONG SIK |
分类号 |
G01B11/03;G01N21/88;H01L21/66;H05K13/08 |
主分类号 |
G01B11/03 |
代理机构 |
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主权项 |
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