SUBSTRATE TRANSFERRING ROBOT FOR BEING CAPABLE OF CHANGING OPERATION AREA

摘要

PURPOSE: A substrate transfer robot is provided to minimize manufacture unit costs of a robot by reducing unnecessary action zone of the robot. CONSTITUTION: An elevating shaft(111) is formed which can be ascended and descended about a base part. An arm base(300) is combined with the elevating shaft. The arm base moves up and down according to the elevating shaft. A top arm body(120) and a bottom arm body are fixed to the top and bottom of one side of the arm base. The top arm body faces the bottom arm body. The arm base is replaceable to a replace arm base. The fixed location of the replace arm base is same as the fixed location of the arm base. The outer shape of the replace arm base is difference with the outer shape of the arm base.