SEMICONDUCTOR SUBSTARTE AND SEMICONDUCTOR PACKAGE

摘要

PURPOSE: A semiconductor substrate and a semiconductor package are provided to implement high frequency system with high integration by using SIW(Substrate Integrated Waveguide) and embedded IC interconnection technology. CONSTITUTION: A cavity is formed on a silicon substrate(100). A first metal layer(103) is formed on the lower side of the cavity by electroplating. Organic materials(105) are filled in the cavity by a lamination process. A second metal layer(107) is formed in the cavity with the organic materials by electroplating. A plurality of via holes(109) are formed between the first metal layer and the second metal layer.