SUBSTRATE TRANSFERRING UNIT OF COATING REGION HAVING DEVICE FOR FEEDING TRANSFERRING CARRIER

摘要

PURPOSE: A substrate transfer unit of a coating domain is provided to uniformly maintain feeding speed of a substrate by preventing the flow of the substrate in a longitudinal direction and to prevent coating solution stains. CONSTITUTION: A transfer carrier(220) transfers a substrate on a floating unit of a coating domain. A supply and collection roll supplies and collects the transfer carrier. A first transfer roll and a second transfer roll are provided to both sides of the floating unit along a transfer direction of the substrate. The first transfer roll and the second transfer roll transfer the transfer carrier. A cleaning device(228) washes a coating solution which is preparatively discharged on the transfer carrier. A feeding unit transfers the transfer carrier back and forth through the first transfer roll and the second transfer roll.