发明名称 |
Vacuum processing apparatus |
摘要 |
The invention provides a highly reliable plasma processing apparatus having stable sealing performance. The vacuum processing apparatus comprises a vacuum vessel having its inside decompressed; an opening disposed in a wall of the vacuum vessel for communicating the inside with the outside thereof and through which a sample to be processed is taken in and out; a valve body 701 disposed outside the wall for airtightly sealing or opening the opening; and a drive unit for driving the valve body to carry out the sealing or opening operation, the drive unit comprising a first member 705 coupled to an actuator 702 that moves along a substantially linear first direction as a result of operation of the actuator, a second member 706 coupled to the first member 705 that moves along a substantially linear second direction that intersects with the first direction, and the valve body 701 coupled to the second member that seals the opening as a result of the movement of the second member. |
申请公布号 |
US8286822(B2) |
申请公布日期 |
2012.10.16 |
申请号 |
US20100651701 |
申请日期 |
2010.01.04 |
申请人 |
TAUCHI SUSUMU;MAKINO AKITAKA;HITACHI HIGH-TECHNOLOGIES CORPORATION |
发明人 |
TAUCHI SUSUMU;MAKINO AKITAKA |
分类号 |
B65D6/40;B65D43/04;B65D53/02 |
主分类号 |
B65D6/40 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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