| 摘要 |
PURPOSE: An apparatus and method for reproducing slurry for cutting an ingot are provided to improve the quality of the reproduced slurry by processing SiC, Si, or Fe mixed with cutting oil in a stirring process of a reaction bath using ultrasonic waves. CONSTITUTION: A preprocess is performed in a reaction bath to remove impurities before a centrifugal separator. A stirrer(4) and a 3D ultrasonic processor(2) are mounted in the reaction bath. The ultrasonic processor includes a stick type ultrasonic oscillation rod(2a) and is fixed based on a rotation axis of the stirrer. The ultrasonic oscillation rod is formed with triangular or pentagonal shape. [Reference numerals] (20) First centrifugal separator; (40) Second centrifugal separator; (50) Weight control bath; (60) Product storage bath; (AA) Waste slurry; (BB) Cutting oil; (CC) Coarse powder(SiC): abrasives; (DD) Fine powder(Si, Fe); (EE) Waste slurry reaction bath; (FF) Separating and collecting coarse powder(SiC); (GG) First oil(supernatant); (HH) Recollecting remaining effective coarse powder; (II) First oil(fine powder included); (JJ) First oil reaction bath; (KK) Separating and removing fine powder(Si,Fe); (LL) Refined cutting oil; (MM) Refined cutting oil; (NN) Separating and removing remaining fine powder(Si,Fe); (OO) Collected abrasives coarse powder; (PP) Recycled slurry
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