发明名称 |
Microshells with integrated getter layer |
摘要 |
Microshells including a perforated pre-sealing layer and an integrated getter layer are provided. The integrated getter layer may be disposed between other layers of a perforated pre-sealing layer. The perforated pre-sealing layer may include at least one perforation, and a sealing layer may be provided on the pre-sealing layer to close the perforation. |
申请公布号 |
US8288835(B2) |
申请公布日期 |
2012.10.16 |
申请号 |
US201113017844 |
申请日期 |
2011.01.31 |
申请人 |
QUEVY EMMANUEL P.;MONADGEMI PEZHMAN;HOWE ROGER T.;SILICON LABORATORIES INC. |
发明人 |
QUEVY EMMANUEL P.;MONADGEMI PEZHMAN;HOWE ROGER T. |
分类号 |
H01L29/84 |
主分类号 |
H01L29/84 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|