BREAKING APPARATUS AND BREAKING METHOD

摘要

PURPOSE: A breaking apparatus and a breaking method are provided to remove the surface damage of a brittle material substrate while dividing by dividing along a scribing line without the contact of the brittle material substrate and a suction pad. CONSTITUTION: A breaking apparatus comprises a table(2), a supporting unit(11), and a suction pad(21). The surface of a brittleness material substrate(W) accommodating a scribe line(S) is located on a table while facing upward. The supporting unit holds a brittle material substrate in a right position. The suction pad comprises a pressure reducing space and jetting holes. The scribing line on the brittleness plate is formed for the facilitate division of the brittleness material substrate.